CHEMISTRY AND ENERGY

Abstract: High-tech devices including computer, laptop, tablet, smartphone, and many small devices such as smartwatch, medical components and dense dynamic random access memories (DRAM) require complex integrated circuits (IC) transistors.
Nanoscale patterning is, to date, mostly produced by photolithography, i.e. the transfer of an image from a master to a substrate coated with a photoactive material called photoresist.
PRIORITY is aiming to prepare deep-UV active bio-photoacidresist and demonstrate the feasibility of shifting from current oil-based polymer resists to renewable and greener materials. The proposal idea is looking at systems that can be simply brought and employed with the current lithographic methodologies.

Activity : 2020-2021